| Researcher(s): |
J.J. Sudirham |
| Contact: |
j.j.sudirham@math.utwente.nl |
| Team: |
J.J. Sudirham (PhD)
J.J.W. van der Vegt (supervisor)
R.M.J. van Damme (supervisor)
|
| Collaborations: |
Prof. M. Elwenspoek (MESA+ Institute, Univ. Twente) |
| Start-date: |
01-09-2001 |
| Final-date: |
01-09-2005 |
| Funding: |
Dutch Technology Foundation (STW), TWI.5453 |
| Keywords: |
wet-chemical etching, transport phenomena, space-time discontinuous Galerkin |
| Abstract: |
Wet-chemical etching is an important manufacturing technique which is ideally in the mass production of complicated objects with small features. A mask is used to protect the material from the etchant, while the unprotected parts are dissolved by the etching fluid. The desired shape depends on the details of the transport of the etching fluid to and the etching product from the solid surface. The transport phenomena are governed by a number of physical properties which have a large disparity in length scales, which presents challenges for the accurate and efficient numerical simulation of wet-chemical etching. In order to accomplish this, a new space-time discontinuous Galerkin finite element method (DGFEM) has been developed for parabolic partial differential equations with a free boundary. The new method has been validated for two-dimensional problem of wet-chemical etching on a slit. The space-time DGFEM is being developed for the incompressible Navier-Stokes equations for the fluid flow. |
| AMS: |
65M60, 76Rxx, 35R35 |
| Publications: |
2003: JJ Sudirham, JJW van der Vegt and RMJ van Damme, A study on discontinuous Galerkin finite element methods for elliptic problems, Memorandum 1690, Univ. Twente
2004: poster-JMBC Burgersdag 2004
2004: JJ Sudirham, RMJ van Damme and JJW van der Vegt, Space-time discontinuous Galerkin method for wet-chemical etching of microstructures, submitted for Proceeding of ECCOMAS 2004
2004: JJ Sudirham, JJW van der Vegt and RMJ van Damme, Space-time discontinuous Galerkin method for parabolic problems in a time-dependent domain, in preparation
2004: JJ Sudirham, JJW van der Vegt and RMJ van Damme, Space-time discontinuous Galerkin method for convection-diffusion problems with moving boundaries: application to wet-chemical etching, in preparation |
| Outlook: |
1. space-time DGFEM formulation for parabolic problems in time-dependent domains
2. analysis of DGFEM formulation
3. space-time DGFEM for convection-diffusion with moving boundaries: application to wet-chemical etching
4. space-time DGFEM for the incompressible Navier-Stokes equations
5. Design and implementation in the software package |
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